FTIR and Raman study of rapid thermal annealing and oxidation effects on structural properties of silicon-rich SixC1-x thin films deposited by RF co-sputtering
Auteur
Elmaati Ech-chamikh, Youssef Ijdiyaou, Mustapha Azizan, Abdelhadi Essafti, Lahcen Nkhaili, Abdelkader El Kissani, Eric Tomasella
