FTIR and Raman study of rapid thermal annealing and oxidation effects on structural properties of Silicon-rich SixC1-x thin films deposited by R.F co-sputtering
Auteur
Abdel-ilah El khalfi; Elmaati Ech-chamikh; Youssef Ijdiyaou; Mustapha Azizan; Abdelhadi Essafti, Lahcen Nkhaili, El Kissani Abdelkader; Eric Tomasella
