Chemical vapor deposition synthesis and characterization of co-deposited silicon-nitrogen-boron materials - Détails de la publication

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Chemical vapor deposition synthesis and characterization of co-deposited silicon-nitrogen-boron materials

Auteur

A. Essafti, C., Gómez-Aleixandre, J.L.G. Fierro, M. Fernández, J.M. Albella.

Revue

Journal of Materials Research

Année

1996

Chercheur

ESSAFTI ABDELHADI

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