Preparation of Si-N-B films by CVD techniques: Effect of SiH4 addition to B2H6 and NH3 gas mixtures - Détails de la publication

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Preparation of Si-N-B films by CVD techniques: Effect of SiH4 addition to B2H6 and NH3 gas mixtures

Auteur

A. Essafti, C. Gómez-Aleixandre, J.M. Albella.

Revue

Diamond and Related Materials

Année

1996

Chercheur

ESSAFTI ABDELHADI

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