Structural and chemical analysis of amorphous B-N-C thin films deposited by RF sputtering - Détails de la publication

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Structural and chemical analysis of amorphous B-N-C thin films deposited by RF sputtering

Auteur

A. Essafti, E. Ech-Chamikh, J.L.G. Fierro.

Revue

Diamond and Related Materials

Année

2005

Chercheur

ESSAFTI ABDELHADI

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